Outlook and Challenges of Nano Devices, Sensors, and MEMS

Outlook and Challenges of Nano Devices, Sensors, and MEMS

Li, Ting; Liu, Ziv

Springer International Publishing AG

03/2017

521

Dura

Inglês

9783319508221

15 a 20 dias

1212


ebook

Descrição não disponível.
Introduction.- High-k dielectric for nanoscale MOS devices.- Performance, optimization, and reliability of FinFET devices.- Performance, optimization, and challenges of emerging nanowire field-effect transistors.- Graphene technology for future MEMS and sensor applications.- Nanoscale sensors for next-generation optical transceiver applications.- Nanoscale MEMS for future optical communication applications.- Nanoscale devices for biomedical applications.- Effect of nanoscale structure on reliability of nano devices and sensors.- Compact modeling of nano devices and sensors.- Three-dimensional TCAD simulation of nano semiconductor devices.- Fabrication of nano devices based on novel material.- Novel processing technology for fabricating nano devices and sensors.- Conclusions.
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FinFET devices;Nanoscale MEMS;Nanoscale MOS devices;Nanoscale semiconductor devices;Nanoscale sensors