Metal Impurities in Silicon- and Germanium-Based Technologies
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portes grátis
Metal Impurities in Silicon- and Germanium-Based Technologies
Origin, Characterization, Control, and Device Impact
Simoen, Eddy; Claeys, Cor
Springer International Publishing AG
08/2018
438
Dura
Inglês
9783319939247
15 a 20 dias
869
Descrição não disponível.
Preface.- Introduction.- Basic Properties of Metals in Semiconductors.- Sources of Metals in Si and Ge Processing.- Characterization and Detection of Metals in Silicon and Germanium.- Electrical Activity of Metals in Si and Ge.- Impact of Metals on Silicon Devices and Circuits.- Gettering and Passivation of Metals in Silicon and Germanium.- Modeling and Simulation of Metals in Silicon and Germanium.- Conclusions.
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Metal Gettering;Metal Precipitation and Segregation;Defects and Device Performance;Defect Engineering;Device Yield Improvement;Semiconductor Device Fabrication
Preface.- Introduction.- Basic Properties of Metals in Semiconductors.- Sources of Metals in Si and Ge Processing.- Characterization and Detection of Metals in Silicon and Germanium.- Electrical Activity of Metals in Si and Ge.- Impact of Metals on Silicon Devices and Circuits.- Gettering and Passivation of Metals in Silicon and Germanium.- Modeling and Simulation of Metals in Silicon and Germanium.- Conclusions.
Este título pertence ao(s) assunto(s) indicados(s). Para ver outros títulos clique no assunto desejado.
